Currently, the development of products at the nano and microscale is being driven by economicnecessity in highly developed countries in order to improve the quality of life, and in recent yearsto prevent the spread of global terrorism. Nano technology is seen as the next step in the industrial revolution and, as such, requires manufacturing processes that will revolutionize the way small products are made. The promises offered by nanotechnology will change the way we exist. The challenges for engineers and scientists are manifest in the construction of products at such small scales, which has been the preserve of Mother Nature since the creation of the universe.
This book is concerned with the technology of fabrication and manufacturing of engineering and brief overview of techniques used in the semiconductor industry for constructing electronic circuits and provides clues for scaling manufacturing processes to operate at the nanoscale for nonsemiconductor applications. The construction of microscale components using established lithographic microscale components is described, including examples of using LiGA and deep x-ray lithography to fabricate master molds that are subsequently used to manufacture microscale and nanoscale products.
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